首页> 外国专利> METHOD, APPARATUS AND COMPUTER PROGRAM FOR MEASURING AND PROCESSING A SPECTRUM OF AN XUV LIGHT SOURCE FROM SOFT X-RAYS TO INFRARED WAVELENGTH

METHOD, APPARATUS AND COMPUTER PROGRAM FOR MEASURING AND PROCESSING A SPECTRUM OF AN XUV LIGHT SOURCE FROM SOFT X-RAYS TO INFRARED WAVELENGTH

机译:用于测量和处理从软X射线到红外波长的XUV光谱的方法,装置和计算机程序

摘要

Method for measuring and processing by means of a broadband spectrometer (1) a spectrum of light (7) generated by an XUV source for generating light in a wavelength range from soft x-rays to infrared wavelengths, wherein the processing is based on the assessment of a wavelength range in the measured spectrum which has a negligible higher order contribution to longer-wavelengths than said range.
机译:通过宽带光谱仪( 1 )测量和处理XUV光源产生的光谱( 7 )的光谱的方法,该光谱用于产生软x波长范围内的光-射线至红外波长,其中所述处理基于对所测光谱中的波长范围的评估,该波长范围对更长波长的可忽略的更高阶贡献比所述范围大。

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