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METHOD, APPARATUS AND COMPUTER PROGRAM FOR MEASURING AND PROCESSING A SPECTRUM OF AN XUV LIGHT SOURCE FROM SOFT X-RAYS TO INFRARED WAVELENGTH
METHOD, APPARATUS AND COMPUTER PROGRAM FOR MEASURING AND PROCESSING A SPECTRUM OF AN XUV LIGHT SOURCE FROM SOFT X-RAYS TO INFRARED WAVELENGTH
Method for measuring and processing by means of a broadband spectrometer (1) a spectrum of light (7) generated by an XUV source for generating light in a wavelength range from soft x-rays to infrared wavelengths, wherein the processing is based on the assessment of a wavelength range in the measured spectrum which has a negligible higher order contribution to longer-wavelengths than said range.
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