Method, apparatus and computer program for measuring and processing spectrum of XUV light source from soft x-ray to infrared wavelength

摘要

A method for measuring and processing a spectrum of light (7), using a broadband spectrometer (1), produced by an XUV source for producing light in a wavelength range from soft x-rays to infrared wavelengths, said process comprising , And a negligible higher order contribution to wavelengths longer than this range.