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ENERGY CONTROLLER FOR EXCIMER-LASER SILICON CRYSTALLIZATION
ENERGY CONTROLLER FOR EXCIMER-LASER SILICON CRYSTALLIZATION
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机译:准分子激光结晶的能量控制器
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摘要
Excimer laser annealing apparatus includes and excimer laser delivering laser-radiation pulses to a silicon layer supported on a substrate translated with respect to the laser pulses such that the consecutive pulses overlap on the substrate. The energy of each of the laser-radiation pulses is monitored, transmitted to control-electronics, and the energy of a next laser pulse is adjusted by a high-pass digital filter.
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