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BORON FILM REMOVING METHOD, AND PATTERN FORMING METHOD AND APPARATUS USING BORON FILM
BORON FILM REMOVING METHOD, AND PATTERN FORMING METHOD AND APPARATUS USING BORON FILM
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机译:硼膜去除方法,使用硼膜的图案形成方法和装置
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摘要
In a method for removing a boron film formed on a substrate by CVD, heat treatment is performed on a part or all boron film in an oxidizing atmosphere and oxidizing a heat-treated portion. Then, an oxidized portion of the boron film is removed by water or aqueous solution containing electrolyte ions.
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