首页> 外国专利> CARRIER ADAPTER INSERT APPARATUS AND CARRIER ADAPTER INSERT DETECTION METHODS

CARRIER ADAPTER INSERT APPARATUS AND CARRIER ADAPTER INSERT DETECTION METHODS

机译:载具适配器插入装置和载具适配器插入检测方法

摘要

Methods, apparatus, and assemblies are provided for a substrate carrier adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.
机译:提供了一种用于基板载体适配器插入件的方法,装置和组件,该插入件包括:适配器框架,该适配器框架包括适于将一个或多个基板支撑在基板载体中的支撑轨道;框架延伸部,该框架延伸部与适配器框架耦合或一体形成;以及映射特征形成在框架延伸部分上,并设置成由传感器检测,以用于确定衬底载体中是否存在适配器插件。公开了许多附加特征。

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