CARRIER ADAPTER INSERT APPARATUS AND CARRIER ADAPTER INSERT DETECTION METHODS
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机译:载具适配器插入装置和载具适配器插入检测方法
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摘要
Methods, apparatus, and assemblies are provided for a substrate carrier adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.
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