Method for producing a measuring probe that enables direct preview of a measuring place by means of the microscopy methods with the scanning probe

摘要

The purpose of the notification is to produce a measuring probe for precise measurements of the surface of the material on a micro - and nanoscale, enabling a direct view of the measuring site,in which a flat beam (5) and a blade matrix in the form of spikes or cones of the selected material are made,which includes the following steps: placing the flat beam (5) and the blade matrix in the FIB device chamber; attaching the needle (2) of the manipulator in the FIB device chamber to the selected blade (1)by means of metallic welding; cutting of the blade (1) from the base with a blade base (1) under the shell to the base using a concentrated ion beam; transport of the blade (1) to the flat edgeIki (5) using a manipulator in the FIB device chamber; blade (1) connection to beam (5) by placing a metal coil (6) at the point of contact of beam (5) and blade base (1) in the device chamberFIB and attach the blade (1) to the beam (5) in such a way that the blade (1) is placed below the beam surface (5) at the free end of the beam so,to expose the tip of the blade (7) outside the edge of the free end of the beam (5), to cut off (8) the needle (2) from the blade manipulator (1) using a concentrated ion beam.