首页> 外国专利> PROCESS FOR PASSIVATION OF SEMICONDUCTOR SURFACES OF COMPOUNDS FROM GROUPS III-V, TO OBTAIN A GACL-SBS/GASB-TYPE SENSITIVE STRUCTURE

PROCESS FOR PASSIVATION OF SEMICONDUCTOR SURFACES OF COMPOUNDS FROM GROUPS III-V, TO OBTAIN A GACL-SBS/GASB-TYPE SENSITIVE STRUCTURE

机译:将化合物III-V的半导体表面钝化以获​​得GACL-SBS / GASB型敏感结构的过程

摘要

The invention relates to a process for passivation of semiconductor surfaces made of compounds of groups III-V with sulphur compounds, applicable to Schottky devices for evaluation of microbial activity. According to the invention, the method consists in that a semiconductor of the type GaSb or GaAs is introduced into a solution of aliphatic thiol dissolved in ethyl alcohol or in a solution of chlorine sulphide dissolved in carbon tetrachloride, at the ambient temperature, to result in a semiconductor surface with reduced surface state density compatible with subsequent technological processing.
机译:本发明涉及一种用硫化合物钝化由Ⅲ-Ⅴ族化合物制成的半导体表面的方法,该方法适用于肖特基装置以评价微生物活性。根据本发明,该方法在于在环境温度下将GaSb或GaAs类型的半导体引入溶解在乙醇中的脂肪族硫醇溶液或溶解在四氯化碳中的硫化氯溶液中。具有降低的表面状态密度的半导体表面,与随后的工艺处理兼容。

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