TESTING DEVICE, TESTING METHOD, LIBRARY GENERATING DEVICE, LIBRARY GENERATING METHOD, COMPUTER PROGRAM, AND RECORDING MEDIUM

摘要

A testing device (100) is provided with: an emission unit (110) that emits a terahertz wave (THz) to a sample (S) having a plurality of layers (L) which are layered; a detection unit (130) that detects the terahertz wave from the sample and acquires a detection waveform (DW); and an estimation unit (1522) that estimates the position (B) of an interface between the plurality of layers on the basis of the detection waveform and a library (1521a) indicating an estimation waveform (EW). The library is generated on the basis of a sample waveform that is the detection waveform acquired by emitting a terahertz wave to the sample or a sample member (SP) having the same specification as the sample.