TESTING DEVICE, TESTING METHOD, LIBRARY GENERATING DEVICE, LIBRARY GENERATING METHOD, COMPUTER PROGRAM, AND RECORDING MEDIUM

摘要

An inspection apparatus (100) is provided with: an irradiating device (110) configured to irradiate a sample (S) in which a plurality of layers (L) are laminated with a terahertz wave (THz); a detecting device (130) configured to detect the terahertz wave from the sample to obtain a detected waveform (DW); and an estimating device (1522) configured to estimate a position (B) of a boundary surface of the plurality of layers on the basis of the detected waveform and a library (1521a) indicating an estimated waveform (EW), the library is generated on the basis of a sample waveform that is the detected waveform obtained by irradiating the sample or a sample member (SP) with the terahertz wave, the sample member has specifications that are same as those of the sample.