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EVAPORATION MASK PLATE, SHEATHING EVAPORATION MASK PLATE, EVAPORATION SYSTEM AND ALIGNMENT TESTING METHOD

机译:蒸发面膜,护套蒸发面膜,蒸发系统及对准测试方法

摘要

Disclosed are an evaporation mask plate (200), a sheathing evaporation mask plate, an evaporation system and an alignment testing method. The evaporation mask plate (200) comprises a mask pattern plate (1). The mask pattern plate (1) comprises an evaporation region (4) and a testing region (6) located at the periphery of the evaporation region (4). The testing region (6) is provided with at least two sets of testing unit groups (10), the two sets of testing unit groups (10) are located in different regions of the testing region (6), and each of the testing unit groups (10) comprises at least one testing hole (11) for alignment.
机译:公开了一种蒸发掩模板(200),护套蒸发掩模板,蒸发系统和对准测试方法。蒸发掩模板(200)包括掩模图案板(1)。掩模图案板(1)包括蒸发区域(4)和位于蒸发区域(4)的外围的测试区域(6)。测试区域(6)至少具有两组测试单元组(10),两组测试单元组(10)位于测试区域(6)的不同区域,并且每个测试单元组(10)包括至少一个用于对准的测试孔(11)。

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