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EVAPORATION MASK PLATE, SHEATHING EVAPORATION MASK PLATE, EVAPORATION SYSTEM AND ALIGNMENT TESTING METHOD
EVAPORATION MASK PLATE, SHEATHING EVAPORATION MASK PLATE, EVAPORATION SYSTEM AND ALIGNMENT TESTING METHOD
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机译:蒸发面膜,护套蒸发面膜,蒸发系统及对准测试方法
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摘要
Disclosed are an evaporation mask plate (200), a sheathing evaporation mask plate, an evaporation system and an alignment testing method. The evaporation mask plate (200) comprises a mask pattern plate (1). The mask pattern plate (1) comprises an evaporation region (4) and a testing region (6) located at the periphery of the evaporation region (4). The testing region (6) is provided with at least two sets of testing unit groups (10), the two sets of testing unit groups (10) are located in different regions of the testing region (6), and each of the testing unit groups (10) comprises at least one testing hole (11) for alignment.
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