SPUTTER COATING MACHINE AND SPUTTER COATING METHOD

摘要

A sputter coating machine, comprising: a rail (10); a carrier (20) provided on the rail (10) and capable of moving along the rail (10), the carrier (20) comprising a frame-shaped substrate (21), a frame-shaped boss (22) connected to the frame-shaped substrate (21) from the inner side of the frame-shaped substrate (21), and a frame-shaped opening (23) located at the inner side of the frame-shaped boss (22), and the frame-shaped substrate (21) being provided with a plurality of recesses (215) distributed around the frame-shaped boss (22); a target material (30) corresponding to the frame-shaped opening (23); a plurality of fastening and tightening devices (40) of which the number corresponds to that of the plurality of recesses (215), the fastening and tightening devices (40) each comprising a sliding block (41) capable of moving along a recess (215), a threaded rod (42) passing through a threaded hole in the sliding block (41) to connected to threads thereof, a pressing sheet (43) fitted to the upper surface of the sliding block (41), and a plurality of screws (44), one end of the threaded rod (42) abutting against on the outer surface of the frame-shaped boss (22), the shape of the upper surface of the sliding block (41) being fitted to the shape of the lower surface of the pressing sheet (43), and the plurality of screws (44) being used for fixing the pressing sheet (43) and the sliding bock (41) together; a plurality of pressing strips (50) which has a shape fitted to the upper surface of the frame-shaped boss (22) and is used for fitting to the frame-shaped boss (22) after a mask sheet (60) is tightened and flattened so that the mask sheet (60) is fixed between the pressing strips (50) and the frame-shaped boss (22). Also disclosed is a sputter coating method.