METHOD FOR MANUFACTURING VERTICAL RESONATOR-TYPE SURFACE-EMITTING LASER ELEMENT, VERTICAL RESONATOR-TYPE SURFACE-EMITTING LASER ELEMENT, DISTANCE SENSOR, AND ELECTRONIC DEVICE

摘要

[Problem] To provide: a method for manufacturing a vertical resonator-type surface-emitting laser element exhibiting excellent conductivity/heat-dissipation; the vertical resonator-type surface-emitting laser element; a distance sensor; and an electronic device. [Solution] In the method for manufacturing a vertical resonator-type surface-emitting laser element according to the present technology: a first substrate is created by sequentially stacking a dielectric DBR layer and a first dielectric to-be-bonded layer on a support substrate; a second substrate is created by sequentially stacking a semiconductor DBR layer, an electric current constriction layer, an active layer, a contact layer, and a second dielectric to-be-bonded layer on a semiconductor substrate; the dielectric to-be-bonded layers are bonded together; and a bonded body of the first substrate and the second substrate is annealed.