首页> 外国专利> STRAIN GAUGE COMPRISING A FLEXIBLE SUBSTRATE AND A RESISTANCE LAYER, AND SENSOR ELEMENT COMPRISING A STRAIN GAUGE

STRAIN GAUGE COMPRISING A FLEXIBLE SUBSTRATE AND A RESISTANCE LAYER, AND SENSOR ELEMENT COMPRISING A STRAIN GAUGE

机译:包含挠性基板和电阻层的应变仪,以及包含应变仪的传感器元件

摘要

The invention relates to a strain gauge (10) comprising a flexible substrate (12) and a resistance layer (14) which is arranged on the flexible substrate. At least one measuring resistor (18) with a conductor track (15), which comprises at least one straight conductor track section (40) and/or at least one curved conductor track section (42), is formed in the resistance layer by structuring the resistance layer, wherein the specific resistance of the resistance layer is based on an elongation in the longitudinal direction (34) and an elongation in a transverse direction (36) perpendicularly thereto. The strain gauge has at least one cutout (28) in the shape of a thinned region or at least one incision (30), and the at least one cutout is arranged within the at least one conductor track section (40, 42) or at a distance from the at least one conductor track section, said distance being smaller than ten times the thickness (D) of the flexible substrate. The depth (d) of the at least one cutout is at least 1/100 the width (B) of the at least one conductor track section when seen from the side on which the resistance layer is arranged. The invention additionally relates to sensor elements comprising at least one such strain gauge, to a method for adjusting the creep behavior of such sensor elements, to a method for minimizing the temperature coefficient of a measuring resistor of such sensor elements, and to a method for minimizing the transverse sensitivity of such sensor elements.
机译:本发明涉及一种应变仪(10),其包括柔性基板(12)和布置在柔性基板上的电阻层(14)。通过结构化在电阻层中形成至少一个具有导体轨道(15)的测量电阻器(18),该测量电阻器包括至少一个直的导体轨道部分(40)和/或至少一个弯曲的导体轨道部分(42)。电阻层,其中电阻层的比电阻是基于纵向(34)上的伸长率和垂直于其的横向(36)上的伸长率。应变仪具有至少一个呈变薄区域或至少一个切口(30)形状的切口(28),并且该至少一个切口被布置在至少一个导体轨道部分(40、42)内或至少一个导体轨道部分(40、42)处。与至少一个导体轨道部分相距一距离,该距离小于柔性基板的厚度(D)的十倍。当从布置电阻层的一侧观察时,至少一个切口的深度(d)是至少一个导体轨道部分的宽度(B)的至少1/100。本发明还涉及包括至少一个这样的应变仪的传感器元件,用于调节这种传感器元件的蠕变特性的方法,用于最小化这种传感器元件的测量电阻器的温度系数的方法以及用于最小化这种传感器元件的横向灵敏度。

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