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METHOD FOR CONTINUOUSLY DETERMINING ALL OF THE COMPONENTS OF THE RESISTANCE TENSOR OF THIN FILMS

机译：连续测定薄膜电阻张量的所有成分的方法

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摘要

The invention relates to a method for continuously determining all the components of the resistance tensor of thin films, such as thin film resistors and thin film sensors of all types. The invention is to provide a method for continuously determining all of the components of the resistance tensor of thin films, such as thin film resistors and thin film sensors of all types, wherein a continuous determination of all the components of the resistance tensor is facilitated without switching the contact points using a minimum number of contacts. This is achieved in that a homogeneous thin film part (T) of any shape is provided with at least three contact points (K_i to K₃) arranged at distances from one another. An input voltage U_i(t) is applied at each of the contact points (K₁ to K₃), the currents I_i(t) flowing through the contact points (K₁ to K₃) are detected, and the complete resistance tensor p of the thin film part (T) is determined from the voltage and current values.

机译：本发明涉及一种连续确定薄膜电阻张量的所有分量的方法，例如所有类型的薄膜电阻器和薄膜传感器。本发明提供了一种用于连续确定薄膜的电阻张量的所有分量的方法，诸如所有类型的薄膜电阻器和薄膜传感器，其中便于连续确定电阻张量的所有分量。使用最少数量的触点切换触点。这是通过在任意形状的均质薄膜部分（T）上设置至少三个接触点（K _{i 至K _{3 ）来实现的，该至少三个接触点彼此间隔一距离。另一个。在每个接触点（K _{1 至K _{3 ）上施加输入电压 U _{i （t）），检测流过接触点（K _{1 到K _{3 ）的电流I _{i （t），并完成电阻张量薄膜部分（T）的 p 由电压和电流值确定。}}}}}}}} 展开▼

著录项

公开/公告号WO2019179972A1

专利类型

公开/公告日2019-09-26

原文格式PDF

申请/专利权人 HELMHOLTZ-ZENTRUM DRESDEN - ROSSENDORF E.V.;
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申请/专利号WO2019EP56760

发明设计人 KOSUB TOBIAS;
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申请日2019-03-19

分类号G01R1/073;G01R27/02;

国家 WO

入库时间 2022-08-21 11:53:11

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3. METHOD FOR CONTINUOUSLY DETERMINING ALL OF THE COMPONENTS OF THE RESISTANCE TENSOR OF THIN FILMS [P] . US2021231595A1 . 2021-07-29

机译：连续确定薄膜电阻张力的所有组分的方法

4. Method for the continuous determination of all components of a resistance tensor of thin films [P] . 德国专利： DE102018106466B3 . 2019-04-25

机译：连续测定薄膜电阻张量所有成分的方法

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机译：电阻材料，形成电阻薄膜的溅射靶材，电阻薄膜和薄膜电阻器以及形成电阻薄膜的溅射靶材的制造方法和电阻薄膜的制造方法

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