TF-SAW RESONATOR WITH IMPROVED QUALITY FACTOR, RF FILTER AND METHOD OF MANUFACTURING A TF-SAW RESONATOR

摘要

A TF-SAW resonator with improved quality factor is provided. The resonator has its piezoelectric material in the form of a thin film and an electrode structure arranged on the piezoelectric layer. Pitch (P) and metallization ratio (n) are chosen to maximize the quality factor (Q).