BAW RESONATOR WITH IMPROVED COUPLING, RF FILTER COMPRISING A BAW RESONATOR AND METHOD OF MANUFACTURING A BAW RESONATOR

摘要

An improved BAW resonator with an increased electroacoustic coupling is provided. The resonator has a monocrystalline piezoelectric material (MCPM) obtained by layer transfer of LN, LT or quartz between a bottom electrode (BE) and a top electrode (TE).