An Effective Method for Improving Silicon Micro-resonator System Performance

摘要

The working principle of silicon micro-resonator system was firstly introduced. An intelligent silicon micro-resonator system design and realization was presented in focus. There are two steps working flows for roughness and fine searching. Meanwhile the digital interface technology was analyzed in detail. Combined with experimental data and sweeping curve, two different searching results came out in different vacuum circumstance and its working performance was well evaluated.