A system, method and computer program product for correcting a differential image generated from a comparison of a target die with a reference die

摘要

A system, method and computer program product are provided for correcting a difference image generated from a comparison of a target die and a reference die. In use, intra-die inspection of the target die image is performed to generate a first representative image for each pattern of interest. Intra-die inspection of the reference die image is performed to generate a second representative image for each pattern of interest. Also, the target die image and the reference die image are compared to generate at least one differential image, and at least one differential image is corrected using each of the generated first representative image and each second representative image generated. Detection is then performed using the corrected difference image.