A method for cleaning a vacuum system used in the manufacture of OLED devices, a method for vacuum deposition on a substrate for making OLED devices, and a device for vacuum deposition on a substrate for manufacturing OLED devices

摘要

The present disclosure provides a method (100) for cleaning a vacuum system used in the manufacture of OLED devices. The method 100 includes performing a pre-clean to clean at least a portion of the vacuum system, and performing a plasma cleaning using a remote plasma source.