Laser Beam Homogenizer having Zooming Apparatus

摘要

The present invention relates to a laser beam homogenizer including a zooming apparatus which can maintain a gradient and homogeneity of a laser beam while controlling the size of the beam. According to an embodiment of the present invention, the laser beam homogenizer including a zooming apparatus comprises: a first array lens which is fixed and arranged on an optical axis on which a laser is outputted, and includes micro lenses of a prescribed form formed on a base of a plate form at regular intervals; a second array lens which is separated from the first array lens, is arranged on the same optical axis, is arranged to be moved along the optical axis, and includes micro lenses of a prescribed form formed on a base of a plate form at regular intervals; a third array lens which is separated from the second array lens, is arranged on the same optical axis, is arranged to be moved along the optical axis, and includes micro lenses of a prescribed form formed on a base of a plate form at regular intervals; and a condensing lens which is separated from the third array lens, is arranged on the same optical axis, and focuses a received laser. The length D of one edge of an image formed by the laser passing through the condensing lens is determined by an equation, and the positions of the second and the third array lens are adjusted to satisfy d1(d2-f2-f3)+f2(-d2+f3)=0.