Apparatus for generating linear intensity distribution in working plane, has homogenizer unit comprising lens arrays which are arranged such that laser beams superimposed by superimposing unit are homogenized partially

摘要

A homogenizer unit (4) has lens arrays (5) for partially homogenizing multiple laser beams (2) passing in vertical direction (X). A superimposing unit (7) is arranged to superimpose the laser beams that are partially homogenized by homogenizer unit. A homogenizer unit (12) has lens arrays which are arranged such that the laser beams superimposed by superimposing unit are homogenized partially.