A component (10) comprising a substrate (20) having a front surface (22) and a rear surface (21) spaced from the front surface, an opening (30) extending from the rear surface toward the front surface, And may include an elongated conductive via 40. The substrate 20 may have a CTE of less than 10 ppm /C. The openings 30 may define an inner surface 31 between the front surface 22 and the rear surface 21. Conductive via 40 may include a first metal layer 41 overlying inner surface 31 and a second metal region 42 overlying and electrically coupled to the first metal layer. The second metal region 42 may have a CTE that exceeds the CTE of the first metal layer 41. The conductive vias 40 may have an effective CTE that is less than 80% of the CTE of the second metal region 42 over the diameter D of the conductive vias.
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