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Improved Semiconductor Processing Equipment Tool Pedestal / Pad Vibration Isolation and Reduction Methods
Improved Semiconductor Processing Equipment Tool Pedestal / Pad Vibration Isolation and Reduction Methods
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机译:改进的半导体加工设备工具基座/垫块振动隔离和减少方法
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摘要
The present invention provides a method, system, and facility for removing or substantially reducing process-limiting vibrations within a high-precision device manufacturing facility. The erected structures within the manufacturing facility support the high-precision device manufacturing equipment and provide space for reducing vibration between the building floor and the top of the erected structures.
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