METHOD OF MANUFACTURING CERAMIC ELECTROSTATIC CHUCK USING LIQUID SINTERING METHOD AND CERAMIC ELECTROSTATIC CHUCK MANUFACTURED BY THE SAME

摘要

The present invention discloses a method of manufacturing a ceramic electrostatic chuck including: a step of being equipped with an electrostatic plate of a ceramic material; a step of forming an electrode for adsorbing static electricity on one surface of the electrostatic plate; a step of being equipped with a base plate corresponding with the electrostatic plate; and a step of respectively adhering to the electrostatic plate completing a formation of the electrode for adsorbing static electricity and the base plate by using a low temperature liquid bonding paste.