- - VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAY WITH MULTIPLE METAL LAYERS FOR ADDRESSING DIFFERENT GROUPS OF EMITTERS

摘要

The present invention relates to an optical device which may comprise an array of vertical-cavity surface-emitting lasers (VCSELs) having a design wavelength, wherein each VCSEL has an emission area. The optical device may comprises: a first metal layer substantially covering an array; a second metal layer substantially covering the first metal layer; and an electrical isolation layer, between the first metal layer and the second metal layer, which includes vias for electrically connecting parts of the first metal layer and parts of the second metal layer. The optical device may comprise a dielectric disposed over the emission area of each VCSEL. A variation in a thickness of the dielectric across at least approximately 90% of an area of the dielectric may be less than approximately 2% of the design wavelength. A depth of a well around the emission area may be equal to at least approximately 10% of a width of the emission area.