Independently addressable InGaAs/GaAs vertical-cavity surface-emitting laser arrays

摘要

The fabrication of an 8*8 independently addressable InGaAs/GaAs vertical-cavity surface-emitting laser array based on planar ion-implantation processes is described. The uniformity of laser characteristics across the array under both pulsed and CW operation is discussed. Simultaneous addressing of multiple lasers is demonstrated.