Pallet Moving Control System Containing Collision Preventing Function and Continuous Driving Function By using Linear Motor and Control Method thereof

摘要

The present invention relates to a pallet moving control system having a collision prevention function and a continuous driving function by using a linear motor and a control method for the same. According to the present invention, the pallet moving control system having a collision prevention function and a continuous driving function by using a linear motor includes: a square plate-shaped semiconductor transfer pallet for transferring a substrate between processes; multiple driving rails having a driving path of the semiconductor transfer pallet and having a grid structure to have a crossing point; multiple roller units installed in the lower part of the semiconductor transfer pallet and moving along the multiple driving rails; a linear motor rail having the grid structure and separated from the driving rail having the grid structure at fixed intervals; multiple linear motors installed on the linear motor rail to generate a driving force for transferring the semiconductor transfer pallet; and a connection rail module for changing a direction. Therefore, according to the present invention, the pallet moving control system can prevent impact and vibration when changing a transfer direction and can provide a collision prevention function and a continuous driving function. So, the pallet moving control system can improve driving capacity.