AUTOMATIC TRANSFER VEHICLE HAVING HANDLING ROBOT HAVING LOADED OBJECT SEPARATION PREVENTING FUNCTION

摘要

An automatic transfer vehicle of the present invention includes: a driving unit moving along a driving path; a robot arm coupled to the driving unit and loading or unloading a cassette on a set position; and a gripper installed on the robot arm and gripping the cassette, wherein the gripper performs tilting so that an opening direction of the cassette is toward an upper portion. Accordingly, the present invention forms a gripper so that an opening portion of the cassette is lifted as much as a set angle by a hinge structure of the gripper and the robot arm and an actuator rotating the gripper, thereby preventing a wafer from being separated from the cassette during operation of the robot arm.;COPYRIGHT KIPO 2019