Foreign body removing device and foreign body removing method

摘要

[PROBLEMS] To provide a foreign matter removing apparatus capable of stably removing foreign matter even in a film-like sheet-like material. A cleaning head (10) having an ejection slit (112) is provided, and a fluid ejected from a ejection slit (112) at a predetermined operation flow rate is blown onto the surface of each leaf (W) A head set mechanism (20, 30a, 30b) for setting the cleaning head (10) at a predetermined operating position in a state in which the flow rate of the fluid from the jetting slit (112) is smaller than the operating flow rate, And a state in which the cleaning head 10 is opposed to the surface of each leaf member W in a state in which the cleaning head 10 is set at the operating position and the fluid is jetted from the jetting slit 112 to the operating flow rate And a rotating mechanism 21 for relatively rotating the cleaning head 10 and each wafers W while keeping the cleaning head 10 and the wafers W relatively clean.