Ultra-Sensitive Humidity-Sensing Films manufacturing method by Aerosol Deposition

摘要

Disclosed is a method for manufacturing an ultra-sensitive humidity-sensing film by an aerosol deposition (AD) process, to provide twice or higher sensitivity and excellent balanced performance at a RH of 20 to 90%. According to the present invention, the method for manufacturing an ultra-sensitive humidity-sensing film by an AD process comprises the following steps: (a) forming a plurality of platinum (Pt) electrodes made of a Pt interdigital capacitor on a glass substrate; (b) using a room temperature AD process to deposit a BaTiO_3 layer on the glass substrate having the Pt interdigital capacitors formed thereon; and (c) preparing a humidity sensor having a bilayer hygroscopic film with different void fractional volumes (VFVs), which are formed with a lower layer (dense layer) and a concentrated upper layer (sparse layer) formed on the lower layer.