Ultra-Sensitive Humidity-Sensing Films manufacturing method by Aerosol Deposition

摘要

Disclosed is a method of manufacturing ultra-sensitive humidity-sensing films by an aerosol deposition (AD) process. Additionally, a bilayer model was developed to describe the mechanism of humidity detection by the prepared BaTiO ₃ membrane. A BaTiO ₃ film was deposited on a glass substrate patterned with a Pt interdigital capacitor using room temperature aerosol deposition (AD), and the humidity sensing performance was performed at 100℃, 200℃, 600℃ for post heat treatment. Evaluated by. The sensor response (capacitance change) of the humidity sensor was measured in a humidity chamber in the range of 20-90% RH. The best sensitivity (461.02) and a balanced performance in the observed 20-90% RH range were observed for the chip annealed at 500°C. Compared to other BaTiO ₃ based humidity sensors, the above chip required less thermal energy to prepare, but at 20-90% RH, a performance with a higher sensitivity and excellent balance was measured. Compared with the BaTiO ₃ based humidity sensor manufactured by other processes, the chip has a higher sensitivity and excellent balance at 20-90% RH even though the thermal energy required for manufacturing is relatively small. Performance was confirmed.