Crystalline solar cells comprising a transparent conductive layer between front-side contacts and methods of producing such solar cells

摘要

The present invention is, on the front-side, over the entire area, as a front-side contact over the first surface passivation layer and the first side regions directly to the semiconductor interface, the first optically transparent and exclusively second electrically conductive material. It relates to a single-sided or double-sided crystalline solar cell in which the first optically transparent and electrically conductive material is arranged in the side regions. In this case, the first optically transparent and electrically conductive material is electrically conductively connected to the front-side contact and to the first region of the semiconductor material of the solar cell. The method according to the invention provides the step of applying the first optically transparent and electrically conductive material only after applying the first optically non-transparent electrically conductive material so that firing through the front-side contact is avoided. Particularly advantageously, the first optically transparent and electrically conductive material is applied by PECVD without interruption of the vacuum just as the deposition of the first antireflective layer on the front-side of the solar cell and as doped metal oxide in the same facility. .