VERTICALLY INTEGRATED MULTI-COATING DEVICE FOR PARYLENE AND METHOD FOR COATING USING SAME

摘要

A vertically integrated multi-coating device for parylene according to the present invention comprises: a lower chamber; a parylene accommodating unit; a first heating unit; a thermal decomposition tube; a second heating unit; an upper chamber; a substrate accommodating unit; a cooling unit; a vacuum pump; a sensor unit; a heat controller; a pressure controller; and a needle valve. Therefore, uniform deposition is easily enabled, and a plurality of substrates can be easily coated in a simultaneous manner.;COPYRIGHT KIPO 2020