PVD METHOD FOR PREPARING HIGH-HARDNESS ANTI-BACTERIAL PVD FILM

摘要

The present invention relates to a high-hardness antibacterial PVD film manufacturing method. A first antibacterial film is deposited on a workpiece through a W-Ti alloy target, W is highly hard and strongly antibacterial, and the combination of Ti and W can contribute to adhesive force in the deposition of an antibacterial film, so the performance of a PVD film can be increased. A second antibacterial film deposited on the W-Ti antibacterial film is W-Ti-Ag, and the addition of nano-silver to the second antibacterial film can enhance the antibacterial effect of the antibacterial film while the high hardness of W can protect the nano-silver. Since W has its own antibacterial property, only a small amount of nano-silver is required to be added to the outermost layer of the antibacterial film, and since the market price of W is more reasonable than nano-silver, costs for manufacturing antibacterial films can be lowered.