Polarization interferometer for measuring transmissive objects and optical phase metrology device using the same

摘要

The present invention provides a transmissive polarization interferometer capable of adaptively mounting various samples. According to the present invention, the transmissive polarization interferometer comprises: a light input terminal to receive light emitted from a light source; a polarized beam splitter to split the received light; a first mirror installed on a first surface of the polarized beam splitter to reflect a first polarized light penetrating the polarized beam splitter to the polarized beam splitter; a second mirror attached to a second surface of the polarized beam splitter perpendicular to the first surface to reflect a second polarized light reflected from the polarized beam splitter to the polarized beam splitter; and a light output terminal to output a complex wave, which is generated by combining the first and second polarized lights, penetrating a transmissive sample to the outside. The light input and output terminals, the polarized beam splitter, and the first and second mirrors are received in a housing. The second mirror is a fixed mirror fixed with respect to the second surface, the first mirror is a movable mirror capable of being displaced in a direction perpendicular to the first surface, and a difference between path lengths of the first and second polarized lights is able to be adjusted by displacement of the first mirror.