System and Method for Detecting Degradation Trend of Arm Blade for Wafer Transfer Robot

摘要

The present invention relates to a laser displacement sensor comprising a laser displacement sensor for measuring a separation distance from a female blade for transferring a wafer and a start and end section of a load and unload operation pattern of the arm blade, A controller for calculating an effective measured value to identify each operation pattern and calculating an average value in each section, and a server for analyzing the average value transmitted from the controller and monitoring the deterioration trend in each section of the arm blade , Deterioration of the arm blade of the wafer transfer device in each of the corresponding sections is determined in real time so that the failure rate of the transferred wafer can be prevented in advance to reduce the defect rate of the wafer. A trend detection system and method are disclosed.