ANTISTATIC GROUNDING DEVICE OF PULLEY TYPE SUBSTRATE TRANSFER SYSTEM

摘要

The present invention relates to an antistatic grounding device capable of being applied to a pulley type substrate transfer system. The antistatic grounding device of the pulley type substrate transfer system includes: an outer housing combined with a pulley installed on one end of a pulley type shaft; an inner housing inserted into the outer housing; a conductive unit which is received in the inner housing and in which one side comes in contact with the shaft and the other side comes in contact with the inner housing to conduct a static electric current generated from the shaft to the inner housing; an inner bearing installed between the conductive unit and the inner housing so that a part of the conductive unit is rotated in accordance with rotation of the shaft and the inner housing doesnt rotate; and a connection unit connected to the other side of the inner housing and conducting the static electric current transmitted from the conductive unit to the outside.;COPYRIGHT KIPO 2019