首页> 外国专利> - - METHOD FOR MANUFACTURING ROD-LIKE CARBON-GERMANIUM COMPOSITE AND ROD-LIKE CARBON-GERMANIUM COMPOSITE

- - METHOD FOR MANUFACTURING ROD-LIKE CARBON-GERMANIUM COMPOSITE AND ROD-LIKE CARBON-GERMANIUM COMPOSITE

机译:--制造棒状碳-锗复合材料和棒状碳-锗复合材料的方法

摘要

The present specification discloses a method of manufacturing a semiconductor device, comprising: preparing a reaction tank including a cathode, and a cathode having a base material receiving portion; Filling the base material receiving portion with a germanium base material; Filling the reaction tank with a raw material gas containing a carbon-containing gas; Wherein the pressure of the carbon-containing gas in the reaction tank with respect to the pressure of the raw material gas in the reaction tank is 0.01 to 0.1 , Said rod-shaped carbon-germanium composite comprising a carbon layer on the surface of a rod-shaped germanium core, and A rod-shaped carbon-germanium composite, wherein the rod-shaped carbon-germanium composite is provided with a carbon layer on the surface of the rod-shaped germanium core.
机译:本说明书公开了一种制造半导体器件的方法,该方法包括:准备包括阴极的反应槽,以及具有基材容纳部的阴极;用锗基材填充基材容纳部;向反应槽中填充含有含碳气体的原料气体。其中反应罐中含碳气体的压力相对于反应罐中原料气体的压力为0.01至0.1,所述棒状碳锗复合材料在棒的表面上具有碳层。形锗芯和棒状碳锗复合材料,其中所述棒状碳锗复合材料在所述棒状锗芯的表面上具有碳层。

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