3 CALIBRATION METHOD OF 3 DIMENSIONAL SHAPE DETECTION SYSTEM

摘要

The present invention relates to a calibration method of a three-dimensional shape measurement system having a plurality of pattern projecting parts and one or more cameras. Provided is an efficient calibration method comprising: precision calibration using a high resolution pattern for each region of a circuit board which is already known for a position or an accurate depth value of a circuit component which is a target object for calibration; and simple calibration using a low resolution pattern.