SYSTEM FOR DEPOSITING ONE OR MORE LAYERS ON A SUBSTRATE SUPPORTED BY A CARRIER AND METHOD USING THE SAME

摘要

A system for depositing one or more layers, especially layers comprising organic materials in layers, is described. The system includes a load lock chamber for loading a substrate to be processed, a transfer chamber for transferring the substrate, a vacuum swing module provided between the transfer chamber and the load lock chamber, at least one deposition apparatus, At least one deposition apparatus is connected to the transfer chamber, an additional load lock chamber for unloading the processed substrate, an additional transfer chamber for transferring the substrate, an additional transfer chamber for transferring the substrate, An additional vacuum swing module provided between the chamber and the additional load lock chamber and a carrier return track from the additional vacuum swing module to the vacuum swing module wherein the carrier return track is under vacuum conditions and / Under an inert atmosphere, to transport the carrier.