Film-forming mask, manufacturing method thereof, and repairing method of film-forming mask

摘要

A metal layer (5) having a plurality of through holes (8) containing at least one opening pattern (7) is laminated on a film layer (4) having a plurality of opening patterns (7) At the same time, a mask sheet 1 having one surface divided into a plurality of unit cells 6 having a plurality of the opening patterns 7 and the through holes 8 therein, and the mask sheet 1 And a metal support member 2 which supports the metal layer 5 of the mask sheet 1 and has openings 10 corresponding to the unit cells 6 of the mask sheet 1. This ensures high shape accuracy and positional accuracy in film formation of thin film patterns.