2 DIRECTED ASSEMBLY OF BLOCK COPOLYMER FILMS BETWEEN A CHEMICALLY PATTERNED SURFACE AND A SECOND SURFACE

摘要

A method of fabricating a thin film structure is provided that includes assembling a block copolymer material in the presence of a condensed phase surface on both sides of a thin film, wherein at least one of the sides of the thin film is chemically configured to cause assembly of the block copolymer material. Surface. According to various embodiments, the other of the condensed phase surfaces may be a chemically homogeneous surface or a chemically patterned surface. Also provided are structures, shapes, and templates formed in the domain structure of the block copolymer material. In certain embodiments, complex 3-D shapes and associated structures are provided that are not present in the bulk block copolymer material.