IONIC POLYMER ZnO ACTUATOR WITH PERFORMANCE INCREASED BY PIEZOELECTRIC EFFECT

摘要

The present invention relates to an ionic polymer ZnO (IPZC) actuator with performance increased by piezoelectric effect. According to the present invention, the IPZC actuator with performance increased by piezoelectric effect is manufactured through the steps of: preparing an ionic polymer (10); growing a ZnO seed layer (20) on the upper and lower surfaces of the ionic polymer (10) by dip coating; growing an n-ZnO seed layer (30) on the upper and lower surfaces of the ZnO seed layer (20) by dip coating; growing a p-ZnO seed layer (40) on the upper and lower surfaces of the n-ZnO seed layer (30) by dip coating; and depositing and growing an electrode (50) on the upper and lower surfaces of the p-ZnO seed layer (40) by thermal evaporation. Accordingly, the actuator is flexible, lightweight, and largely deformed, and provides a remarkable effect of providing a low voltage driving effect operated at low voltage.;COPYRIGHT KIPO 2019