首页> 外国专利> LIQUID EJECTION DEVICE NANOIMPRINTING APPARATUS NANOIMPRINTING LIQUID STORAGE TANK METHOD OF MANUFACTURING CURED PRODUCT PATTERN METHOD OF MANUFACTURING OPTICAL COMPONENT METHOD OF MANUFACTURING CIRCUIT BOARD AND METHOD OF MANUFACTURING IMPRINTING MOLD

LIQUID EJECTION DEVICE NANOIMPRINTING APPARATUS NANOIMPRINTING LIQUID STORAGE TANK METHOD OF MANUFACTURING CURED PRODUCT PATTERN METHOD OF MANUFACTURING OPTICAL COMPONENT METHOD OF MANUFACTURING CIRCUIT BOARD AND METHOD OF MANUFACTURING IMPRINTING MOLD

机译:液体喷射设备纳米浸渍装置纳米浸渍液体储存罐制造固化产品图案的方法制造光学元件的方法制造电路板的方法和制造注入模具的方法

摘要

The liquid ejection apparatus includes a containing portion for containing liquid for nano imprinting, and further includes a discharge opening communicating with the containing portion and discharging liquid for nano imprinting. The receptive portion includes a water-absorbing material that adsorbs or absorbs at least one selected from the group consisting of particles, metal ions, and water. The hydrous resin is not discharged from the discharge port when discharging the nanoimprint liquid from the discharge port.
机译:液体喷射装置包括用于容纳用于纳米压印的液体的容纳部,并且进一步包括与该容纳部连通并排​​放用于纳米压印的液体的排出口。接收部分包括吸水材料,该吸水材料吸收或吸收选自颗粒,金属离子和水的至少一种。当从排出口排出纳米压印液体时,没有从排出口排出含水树脂。

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