2 ASSEMBLY FOR PROVIDING AN ALIGNED STACK OF TWO OR MORE MODULES AND A LITHOGRAPHY SYSTEM OR A MICROSCOPY SYSTEM COMPRISING SUCH AN ASSEMBLY

摘要

The present invention preferably relates to an assembly for providing a correctly aligned stack of two or more modules in a stacking direction, for use in a lithography system or a microscopy system. Each of the two or more modules includes three support members. The assembly includes a frame having three flat alignment surfaces extending in the stacking direction and angularly offset relative to one another. Further, when arranged in the frame, each of the three support members of each of the two or more modules borders on a corresponding one of the three alignment surfaces. The frame is provided with an opening between two of the three flat alignment surfaces for inserting the module into the assembly, and the two flat alignment surfaces on either side of the opening are at least partially facing the opening.