METHOD OF THREE-DIMENSIONAL RECONSTRUCTION OF SURFACE OF SAMPLE USING IMAGES OBTAINED USING RASTER ELECTRONIC MICROSCOPE

摘要

FIELD: images processing means.;SUBSTANCE: invention relates to scanning electron microscopy. This invention uses the principle of photogrammetric processing of images obtained in a scanning electron microscope at various inclination angles the test sample. Summary of the invention: an island film is formed on the surface of the test sample, creating a contrast in the image, and the results of photogrammetric image processing are adjusted based on individual island heights determined on a flat surface area.;EFFECT: increased accuracy of the results of three-dimensional reconstruction.;1 cl, 5 dwg