Analysis of Factors Affecting the Accuracy of Three-Dimensional Reconstruction of the Surface of Objects with Submicrometer Relief Obtained by Scanning Electron Microscope Stereo Images

摘要

We present analysis results of factors influencing the systematic error in 3-D reconstruction of surface reliefs based on stereo images obtained using the scanning electron microscope S-4800. The typical size for the surface relief elements is less than 1 mu m. The main sources of the error are found. It is shown that for typical samples the main factor influencing the systematic error of 3-D reconstruction is the parallax measurement error.