PARTICLE WORKING DEVICE WITH A RAY OF LOADED PARTICLES AND METHOD FOR CORRECTING ABERRATIONS OF THE PARTICLES WORKING WITH THE RADIATION WORKING DEVICE

摘要

In a charged particle beam apparatus using a multipole aberration corrector, the charged particle beam fast aberration correction apparatus is designed to include: a charged particle source having a primary beam generates charged particles, an aberration correction optical system that corrects aberrations of the charged particle charged particle beam of the primary charged particle, a detection unit that detects secondary charged particles generated from a sample irradiated with the primary charged particle beam, the detection element of which Aberrations were corrected by the optical aberration correction system, an image forming unit that generates a charged particle image of the sample from a signal obtained by detecting the secondary charged particles by the detection unit, an aberration tion correction amount calculating unit that processes the charged particle image generated by the image forming unit, separates aberrations having different symmetries in the primary charged particle beam, selects aberrations to be preferentially corrected from the separated aberrations, and the amount of correction of the optical aberration correction system for correction of the selected aberration, and an optical aberration correcting system control unit that controls the optical aberration correcting system on the basis of the correction amount calculated by the aberration correction amount calculating unit.