Optical arrangement for the simultaneous formation of surface structures on a substrate by means of direct laser interference structuring

摘要

In the optical arrangement for the simultaneous formation of surface structures on a substrate by means of direct laser interference structuring, the respective surface structure is formed with line-shaped individual elements. It will be formed linear individual elements which are aligned at an angle not equal to 0 ° to each other. A laser beam (1) emitted by a laser beam source is directed onto a diffractive optical element (2) with which the laser beam (1) can be split into at least four partial beams (1.1, 1.2, .... 1.X). The partial beams (1.1, 1.2, ... 1.X) impinge on a second optical element (4), with which the partial beams (1.1, 1.2, ... 1.X) are aligned with each other. The sub-beams (1.1, 1.2, ... 1.X) are focused by means of a focusing optical element (6) in the direction of a surface of a substrate and directed to each other interfering. In the beam path of at least two of the partial beams (1.1, 1.2, ... or 1.X) an optical element (5.1, 5.2, .... 5.Y) is arranged, which is transparent to the laser radiation and its speed of light for the Laser radiation is smaller than the speed of light for the material of an optical element or a medium, in particular air, through which the respective other partial beams (1.1, 1.2, ... 1.X) are directed in the direction of the surface to be structured of the substrate.