Optic device e.g. micro prism, manufacturing method, involves forming substrate surface of silicon substrate of optical device-mold that has number of columnar structures arranged with ditches in arrangement direction on substrate surface

摘要

The method involves forming a substrate surface of a silicon substrate (1) of an optical device-mold that has a number of columnar structures (3) arranged with ditches in an arrangement direction on the substrate surface and a contour structure, which is connected with the columnar structures. The device-mold is oxidized from a state in which the device-mold begins to oxidize up to a state in which the columnar structures are oxidized. A residual part of the contour structure is oxidized to form an oxide block. An independent claim is also included for an optics device with a silicon substrate.